 |
 |
Put air cushions under 15F TFT equipment and
also
wooden bricks to lift equipment. |
In the clean room, riggers operate air cushions on
control moving direction and observing route. |
| |
|
 |
 |
Put four air cushions under 20T TFT equipment
before
lifting operation. |
Put four air cushions under 31T TFT equipment;
the platform for this lifting operation is 8 meters
long
and 4.5 meters wide. |
| |
|
 |
 |
| Use air cushions to move 15T CF equipment CF |
Solar energy 8.5 G：thin film equipment was
moved
by air cushions outside the Fab |
| |
|
 |
 |
Solar energy 8.5 G：thin film production line,
position
air cushions on the line |
Move 9T semiconductor equipment by air cushions. |
| |
|
